Defect Sensitivity Analysis of QSA in Next Generation Silicon Technologies. Chip leakage trends continue to reduce the effectiveness of single threshold IDDQ testing methods. Alternative techniques incorporate a delta or ratio based threshold as a means of reducing the impact of large leakage currents. However. these techniques are not scalable because they are based on the use of a single IDDQ measurement per circuit configuration. Quiescent Signal Analysis (QSA) is a novel IDDQ defect detection and diagnosis technique that uses IDDQ measurements at multiple chip supply pads. The use of multiple measurements points per chip naturally scales down of leakage and can significantly improve detection of subtle defects. In this presentation, regression and ellipse analysis of the data collected from a test chip fabricated in a 65 nm process demonstrate the defect detection capabilities and limits of this technique.